A new technique for transparent solid state Li3PO4 electrolyte layer growth: thermionic vacuum arc technique


ÖZEN S. , KORKMAZ Ş., PAT S., Yudar H. H.

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, vol.28, no.15, pp.11557-11561, 2017 (Journal Indexed in SCI) identifier identifier

  • Publication Type: Article / Article
  • Volume: 28 Issue: 15
  • Publication Date: 2017
  • Doi Number: 10.1007/s10854-017-6955-x
  • Title of Journal : JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
  • Page Numbers: pp.11557-11561

Abstract

In this research, a Li3PO4 electrolyte thin film was deposited on glass substrate under high vacuum condition by means of the thermionic vacuum arc (TVA) method. A new deposition mechanism for solid-state battery applications is presented. The physical properties of the produced sample were analyzed with X-ray diffraction device, spectrophotometer, interferometer, scanning electron microscope, and atomic force microscope. In order to understand the surface features of the thin film, AFM analysis was carried out by non-contact mode at ambient condition. The formation of microstructures were monitored clearly by the AFM device. The UV-Vis spectrophotometer result showed that produced film has a high transmittance in the visible region and near infrared region.