A Rapid Response Humidity Sensor for Monitoring Human Respiration with TiO2-Based Nanotubes as a Sensing Layer

ATALAY S., ERDEMOĞLU S., KOLAT V. S., İZGİ T., Akgeyik E., Yilmaz H. C., ...More

JOURNAL OF ELECTRONIC MATERIALS, vol.49, no.5, pp.3209-3215, 2020 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 49 Issue: 5
  • Publication Date: 2020
  • Doi Number: 10.1007/s11664-020-08006-z
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus, PASCAL, Applied Science & Technology Source, Chemical Abstracts Core, Chimica, Compendex, Computer & Applied Sciences, INSPEC
  • Page Numbers: pp.3209-3215
  • Keywords: Humidity sensor, TiO2, quartz crystal microbalance, nanotubes, TIO2 NANOTUBES
  • Yozgat Bozok University Affiliated: Yes


The use of TiO2-based samples with nanotube (NT) shape for humidity sensing has been investigated. Sample characterization was carried out using x-ray diffraction analysis, scanning electron microscopy (SEM), and Fourier-transform infrared spectroscopy. x-Ray diffraction analysis showed that the nanotubes had TiO2, NaO3, and H2Ti2O5 phases. SEM revealed that the NTs had diameters ranging from 20 nm to 200 nm and very different lengths. TiO2-based nanotubes were coated using the drop-casting method onto a quartz crystal microbalance (QCM). The synthesis of TiO2-based NTs was performed using a hydrothermal process. Humidity sensing measurements showed that the resonant frequency of TiO2-based NTs deposited onto the QCM was very sensitive to humidity changes. It was also shown that the sensor could be used for respiratory monitoring purposes.