Optical, morphological and nano-mechanical properties of chromium oxide thin films fabricated by radio frequency (RF) magnetron sputtering

ÖZEN S., ŞENAY V.

OPTIK, vol.201, 2020 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 201
  • Publication Date: 2020
  • Doi Number: 10.1016/j.ijleo.2019.163433
  • Journal Name: OPTIK
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Academic Search Premier, Aerospace Database, Communication Abstracts, Compendex, INSPEC
  • Keywords: Chromium oxide, Thin film, RF magnetron sputtering, Optical properties, Morphological properties, Mechanical properties, CR2O3, COATINGS, POWER, TEMPERATURE, PERFORMANCE, STABILITY, OXIDATION, SURFACE, MOCVD
  • Yozgat Bozok University Affiliated: Yes

Abstract

In this research, two transparent chromium oxide thin films having different thickness values were simultaneously deposited on glass substrates by adjusting target-substrate distance by means of radio frequency (RF) magnetron sputtering technique. The effect of film thickness on optical, morphological and nano-mechanical properties of the produced thin films were analyzed by using UV-VIS spectrophotometer, interferometer, tensiometer and atomic force microscope. The transmittance and absorbance of the films were measured in the incident photon wavelength range of 300-1000 nm. The optical energy band gap value of the produced thin films was estimated to be approximately 4 eV from the obtained absorbance data via Tauc's method. According to the results obtained from nano-mechanical tests, the produced thin films were highly scratch resistant. From the wetting experiments, it was found that the surfaces of the films were hydrophilic.