Characterization of SiGe Structures Deposited by Thermionic Vacuum Arc (TVA)

ÖZEN S., PAT S., ŞENAY V., KORKMAZ Ş., Gecici B.

7th International Ege Energy Symposium Exhibition, 18 - 20 June 2014, (Full Text)

  • Publication Type: Conference Paper / Full Text
  • Yozgat Bozok University Affiliated: Yes