Investigation of the microstructural, surface and optical properties of nano-layer MoxSy thin film deposited by thermionic vacuum arc

Musaoglu C., PAT S., ÖZEN S., Mohammadigharehbagh R., KORKMAZ Ş.

MATERIALS RESEARCH EXPRESS, vol.6, no.3, 2019 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 6 Issue: 3
  • Publication Date: 2019
  • Doi Number: 10.1088/2053-1591/aaf5b1
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Yozgat Bozok University Affiliated: Yes


Molybdenum disulfide (MoxSy) thin film was deposited onto the glass substrate using Thermionic Vacuum Arc (TVA) technique. MoS2 as know as low-friction coefficient and solid lubricant material and it is a 2-dimension material. In this study, properties of the 2D (MoxSy) were determined. In 2D coating, mixed phase of MoS2, Mo2S3, Mo3S4 and Mo15S19 crystal reflection planes were detected in XRD pattern. The thickness of the film was measured as to be 30 nm. The crystallite sizes were calculated in the range of 6-20 nm. Refractive index value of the deposited layer was found nearly 2. The band gap value of the deposited 2D layer is nearly equal to about 1.98 eV. The dielectric constant for the deposited layer is very close to 4.3. To determine the optical impurity and defects, photoluminescence and Raman analyses were done. Also, friction coefficient of the 2D nano layer was measured by ball on disk technique.