Li3PO4 materials are widely used as a solid electrolyte for the all-solid-state battery, electrochromic and optoelectronic devices including ion conductor layer. Li3PO4 thin films were deposited on glass substrates by RF magnetron sputtering system at argon atmosphere. Surface and optical properties of the Li3PO4 thin films were investigated by some analysis techniques. Scanning electron and atomic force microscope were used to determine of the surface morphologies of produced Li3PO4 thin films. Absorbance and transmittance spectra were recorded using UV-Vis spectrophotometer in the range of 200-1000 nm. The absorbance values were approximately 0.05. The transmittance values were around 88 and 85% for S1 and S2 at 550 nm. The film thickness values of samples were 60 and 90 nm. The reflectance spectra values of the Li3PO4 were about 5.9 and 6.4% at 550 nm for S1 and S2, respectively. The refractive index values of the Li3PO4 were measured as approximately 1.59.