The influence of voltage applied between the electrodes on optical and morphological properties of the InGaN thin films grown by thermionic vacuum arc


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ÖZEN S. , Senay V., PAT S., KORKMAZ Ş.

SCANNING, vol.38, no.1, pp.14-20, 2016 (Journal Indexed in SCI) identifier identifier identifier

  • Publication Type: Article / Article
  • Volume: 38 Issue: 1
  • Publication Date: 2016
  • Doi Number: 10.1002/sca.21237
  • Title of Journal : SCANNING
  • Page Numbers: pp.14-20
  • Keywords: InGaN thin films, thermionic vacuum arc, surface properties, optical properties, surface free energy, REFRACTIVE-INDEX, PHYSICAL-PROPERTIES, ENERGY-GAP, DEPOSITION, MODE

Abstract

The aim of this research is to investigate the optical and morphological properties of the InGaN thin films deposited onto amorphous glass substrates in two separate experiments with two different voltages applied between the electrodes, i.e. 500 and 600V by means of the thermionic vacuum arc technique. This technique is original for thin film deposition and it enables thin film production in a very short period of time. The optical and morphological properties of the films were investigated by using field emission scanning electron microscope, atomic force microscope, spectroscopic ellipsometer, reflectometer, spectrophotometer, and optical tensiometer. Optical properties were also supported by empirical relations. The deposition rates were calculated as 3 and 3.3nm/sec for 500 and 600V, respectively. The increase in the voltage also increased the refractive index, grain size, root mean square roughness and surface free energy. According to the results of the wetting experiments, InGaN samples were low-wettable, also known as hydrophobic. SCANNING 38:14-20, 2016. (c) 2015 Wiley Periodicals, Inc.