Deposition of Al2O3 Ultra-thin Layers by Radio-Frequency Magnetron Sputtering and Study of Their Optical, Morphological and Mechanical Properties

---

ŞENAY V., PAT S., ÖZEN S., KORKMAZ Ş.

International Middle East Plasma Science (IMEPS) Conference, 23 - 25 April 2014, (Summary Text)

• Publication Type: Conference Paper / Summary Text
• Yozgat Bozok University Affiliated: Yes