Deposition of Al2O3 Ultra-thin Layers by Radio-Frequency Magnetron Sputtering and Study of Their Optical, Morphological and Mechanical Properties

ŞENAY V., PAT S., ÖZEN S., KORKMAZ Ş.

International Middle East Plasma Science (IMEPS) Conference, 23 - 25 Nisan 2014

  • Yayın Türü: Bildiri / Özet Bildiri
  • Yozgat Bozok Üniversitesi Adresli: Evet