Optical and surface properties of the in doped GaAs layer deposition using thermionic vacuum arc method

PAT S., ÖZEN S., Senay V., KORKMAZ Ş., Simsek V.

SCANNING, vol.38, no.4, pp.297-302, 2016 (SCI-Expanded) identifier identifier identifier

  • Publication Type: Article / Article
  • Volume: 38 Issue: 4
  • Publication Date: 2016
  • Doi Number: 10.1002/sca.21269
  • Journal Name: SCANNING
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.297-302
  • Yozgat Bozok University Affiliated: Yes


A broadband optical transparent InGaAs semiconductor layer production of micron thicknesses was produced in only 75s by thermionic vacuum arc (TVA) method at the first time. The optical and surface properties of the produced layers have been investigated. InGaAs structure is using in electronics and optoelectronics devices. The main advantage of TVA method is its fast deposition rate, without any loss in the quality of the films. Doping is a very simple and fast according to common production methods. InGaAs is an alloy of indium arsenide (InAs) and gallium arsenide (GaAs). InAs with (220) crystallographic direction and GaAs with (024)/(022) crystallographic directions were detected using by XRD analysis. GaAs and InAs are in the cubic and zinc blende crystal system, respectively. According to the transmittance spectra, sample has a broadband transparency in the range of 1000-3300nm. According to results, defined TVA method for In doping to GaAs is proper fast and friendly method. SCANNING 38:297-302, 2016. (c) 2015 Wiley Periodicals, Inc.